Novel Proximal Group ADMM for Placement Considering Fogging and Proximity Effects

Fogging and proximity effects (FPEs) are two major factors that cause inaccurate exposure and layout pattern distortions in e-beam lithography. In this article, we propose an analytical placement algorithm that considers both FPEs. We formulate the global placement problem as a separable minimizatio...

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Bibliographic Details
Published in:IEEE transactions on computer-aided design of integrated circuits and systems Vol. 41; no. 12; pp. 5541 - 5553
Main Authors: Chen, Jianli, Huang, Zhipeng, Zhu, Ziran, Peng, Zheng, Zhu, Wenxing, Chang, Yao-Wen
Format: Journal Article
Language:English
Published: New York IEEE 01.12.2022
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects:
Algorithms
Alternating direction method
analytical placement
Electron beams
electron-beam lithography (EBL)
Fogging
fogging effect
Layout
Lithography
Mathematical analysis
Optimization
Placement
Proximity
proximity effect
Proximity effects
Steepest descent method
ISSN:0278-0070, 1937-4151
Online Access:Get full text
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Summary:Fogging and proximity effects (FPEs) are two major factors that cause inaccurate exposure and layout pattern distortions in e-beam lithography. In this article, we propose an analytical placement algorithm that considers both FPEs. We formulate the global placement problem as a separable minimization problem with linear constraints, where different objectives can be tackled one by one in an alternating fashion. Then, we propose a novel proximal group alternating direction method of multipliers (ADMM) to solve the separable minimization problem with two subproblems, where the first subproblem (associated with wirelength and density) is solved by the steepest descent method without line search, and the second one (associated with the FPEs) is handled by an analytical scheme. We prove the property of global convergence of the proximal group ADMM method. Finally, the FPEs-aware legalization and detailed placement are employed to legalize and improve the placement result. The experimental results show that our algorithm is effective and efficient for the addressed problem. Our algorithm achieved 5.7% smaller fogging variation, 6.8% lower proximity variation, and 5.4% lower runtime with a minor wirelength overhead compared with the state-of-the-art work.
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ISSN:0278-0070
1937-4151
DOI:10.1109/TCAD.2022.3155066