Polymer self assembly in semiconductor microelectronics
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| Vydané v: | IBM journal of research and development Ročník 51; číslo 5; s. 605 - 633 |
|---|---|
| Hlavní autori: | , , , , , , , |
| Médium: | Journal Article |
| Jazyk: | English |
| Vydavateľské údaje: |
Armonk, NY
International Business Machines
01.09.2007
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| Predmet: | |
| ISSN: | 0018-8646, 0018-8646 |
| On-line prístup: | Získať plný text |
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| Author | Kim, H.-C. Colburn, M. E. Breyta, G. Cheng, J. Y. Ruiz, R. Guarini, K. W. Black, C. T. Zhang, Y. |
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| Author_xml | – sequence: 1 givenname: C. T. surname: Black fullname: Black, C. T. organization: Brookhaven National Laboratory, Center for Functional Nanomaterials, Upton, New York 11973, USA – sequence: 2 givenname: R. surname: Ruiz fullname: Ruiz, R. organization: Hitachi Global Storage Techologies, 3403 Yerba Buena Road, San Jose, California 95135, USA – sequence: 3 givenname: G. surname: Breyta fullname: Breyta, G. organization: IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, California 95120, USA – sequence: 4 givenname: J. Y. surname: Cheng fullname: Cheng, J. Y. organization: IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, California 95120, USA – sequence: 5 givenname: M. E. surname: Colburn fullname: Colburn, M. E. organization: IBM Research Division, Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598, USA – sequence: 6 givenname: K. W. surname: Guarini fullname: Guarini, K. W. organization: IBM Systems and Technology Group, 2455 South Road, Poughkeepsie, New York 12601, USA – sequence: 7 givenname: H.-C. surname: Kim fullname: Kim, H.-C. organization: IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, California 95120, USA – sequence: 8 givenname: Y. surname: Zhang fullname: Zhang, Y. organization: IBM Research Division, Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598, USA |
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| Keywords | Integrated circuits Nanometer scale High performance Self-assembly Microelectronic fabrication Patterning Self organization Semiconductor materials Semiconductor devices Lithography High-resolution methods Semiconductor technology |
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| SubjectTerms | Applied sciences Cross-disciplinary physics: materials science; rheology Electronics Exact sciences and technology Materials science Methods of nanofabrication Microelectronic fabrication (materials and surfaces technology) Physics Self-assembly Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices |
| Title | Polymer self assembly in semiconductor microelectronics |
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