Depth Profile Analysis on the Nanometer Scale by a Combination of Electron Probe Microanalysis (EPMA) and Focused Ion Beam Specimen Preparation (FIB) - B ckins, Matthias; Aretz, Anke; Richter, Silvia; Kyrsta, Stepan; Sp hn, Michael; Mayer, Joachim (Mikrochimica acta (1966), 2004)