Investigation of the Effects of Random Vibration on the Characteristics of Micromechanical Accelerometers

For modern information, measuring, and optoelectronic systems based on micro- and nanomechanical sensors of angular velocity and linear acceleration, it is important to ensure their stable functioning in the presence of external factors. The paper presents the results of a study of the effect of a r...

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Bibliographic Details
Published in:	Russian microelectronics Vol. 49; no. 7; pp. 532 - 537
Main Authors:	Thura, Aung, Simonov, B. M., Tymoshenkov, S. P.
Format:	Journal Article
Language:	English
Published:	Moscow Pleiades Publishing 01.12.2020 Springer Nature B.V
Subjects:	Acceleration Accelerometers Angular velocity CAD Computer aided design Crystallography Deformation Design improvements Electrical Engineering Engineering Optoelectronics Orientation effects Random vibration Silicon Vibration measurement random vibration the spectral density profile of the signal acceleration sensitive element crystallographic orientation of silicon
ISSN:	1063-7397, 1608-3415
Online Access:	Get full text
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