The atomic layer thermopile heat flux sensor based on the inclined epitaxial YBa2Cu3O7-δ films
•Highly c-axis oriented YBCO films are prepared on miscut 12° LaAlO3 substrates.•The ALTP heat flux sensor with high sensitivity of 17.54 μV/(kW/m2) is obtained.•The response frequency of ALTP heat flux sensor is over 1 MHz at −3dB. The atomic layer thermopile (ALTP) heat flux sensor based on highly...
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| Published in: | Materials letters Vol. 330; p. 133336 |
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| Main Authors: | , , , , , , , , |
| Format: | Journal Article |
| Language: | English |
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Elsevier B.V
01.01.2023
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| ISSN: | 0167-577X, 1873-4979 |
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| Abstract | •Highly c-axis oriented YBCO films are prepared on miscut 12° LaAlO3 substrates.•The ALTP heat flux sensor with high sensitivity of 17.54 μV/(kW/m2) is obtained.•The response frequency of ALTP heat flux sensor is over 1 MHz at −3dB.
The atomic layer thermopile (ALTP) heat flux sensor based on highly c-axis oriented YBa2Cu3O7-δ (YBCO) films prepared on miscut 12° LaAlO3 substrates using magnetron sputtering is achieved. Benefiting from good biaxial texture, the YBCO film maintains a large Seebeck coefficient anisotropy, so the sensitivity of the ALTP heat flux sensor reaches 17.54 μV/(kW/m2). In addition, the response frequency of the sensor is higher than 1 MHz due to the high electrical conductivity of the prepared YBCO films, which is also higher than the current maximum (650 kHz) reported in the literature. These results indicate that our ALTP heat flux sensor can realize high-frequency heat flux detection above 1 MHz. |
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| AbstractList | •Highly c-axis oriented YBCO films are prepared on miscut 12° LaAlO3 substrates.•The ALTP heat flux sensor with high sensitivity of 17.54 μV/(kW/m2) is obtained.•The response frequency of ALTP heat flux sensor is over 1 MHz at −3dB.
The atomic layer thermopile (ALTP) heat flux sensor based on highly c-axis oriented YBa2Cu3O7-δ (YBCO) films prepared on miscut 12° LaAlO3 substrates using magnetron sputtering is achieved. Benefiting from good biaxial texture, the YBCO film maintains a large Seebeck coefficient anisotropy, so the sensitivity of the ALTP heat flux sensor reaches 17.54 μV/(kW/m2). In addition, the response frequency of the sensor is higher than 1 MHz due to the high electrical conductivity of the prepared YBCO films, which is also higher than the current maximum (650 kHz) reported in the literature. These results indicate that our ALTP heat flux sensor can realize high-frequency heat flux detection above 1 MHz. |
| ArticleNumber | 133336 |
| Author | Chen, Xi Xia, Yudong Zhao, Ruipeng Zhong, Yao Yang, Kai Li, Zhenzhe Zhang, Tong Tao, Bowan Xie, Tian |
| Author_xml | – sequence: 1 givenname: Xi surname: Chen fullname: Chen, Xi organization: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610000, China – sequence: 2 givenname: Bowan surname: Tao fullname: Tao, Bowan organization: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610000, China – sequence: 3 givenname: Ruipeng surname: Zhao fullname: Zhao, Ruipeng email: ruipengzhao@uestc.edu.cn organization: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610000, China – sequence: 4 givenname: Kai surname: Yang fullname: Yang, Kai organization: Hypervelocity Aerodynamics Institute, China Aerodynamics Research and Development Center (CARDC), Mianyang 621000, China – sequence: 5 givenname: Zhenzhe surname: Li fullname: Li, Zhenzhe organization: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610000, China – sequence: 6 givenname: Tian surname: Xie fullname: Xie, Tian organization: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610000, China – sequence: 7 givenname: Yao surname: Zhong fullname: Zhong, Yao organization: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610000, China – sequence: 8 givenname: Tong surname: Zhang fullname: Zhang, Tong organization: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610000, China – sequence: 9 givenname: Yudong surname: Xia fullname: Xia, Yudong organization: School of Physical Science and Technology, Southwest Jiaotong University, Chengdu 610000, China |
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| Cites_doi | 10.1002/htj.21501 10.2514/1.32011 10.1007/s00348-016-2214-9 10.1115/1.2751141 10.1007/s00339-012-7366-8 |
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| Title | The atomic layer thermopile heat flux sensor based on the inclined epitaxial YBa2Cu3O7-δ films |
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