APA (7th ed.) Citation

Oskirko, V., Zakharov, A., Pavlov, A., Solovyev, А., Semenov, V., & Rabotkin, S. (2020). Hybrid HIPIMS+MFMS power supply for dual magnetron sputtering systems. Vacuum, 181, 109670. https://doi.org/10.1016/j.vacuum.2020.109670

Chicago Style (17th ed.) Citation

Oskirko, V.O, A.N Zakharov, A.P Pavlov, А.А Solovyev, V.A Semenov, and S.V Rabotkin. "Hybrid HIPIMS+MFMS Power Supply for Dual Magnetron Sputtering Systems." Vacuum 181 (2020): 109670. https://doi.org/10.1016/j.vacuum.2020.109670.

MLA (9th ed.) Citation

Oskirko, V.O, et al. "Hybrid HIPIMS+MFMS Power Supply for Dual Magnetron Sputtering Systems." Vacuum, vol. 181, 2020, p. 109670, https://doi.org/10.1016/j.vacuum.2020.109670.