Oskirko, V., Zakharov, A., Pavlov, A., Solovyev, А., Semenov, V., & Rabotkin, S. (2020). Hybrid HIPIMS+MFMS power supply for dual magnetron sputtering systems. Vacuum, 181, 109670. https://doi.org/10.1016/j.vacuum.2020.109670
Citácia podle Chicago (17th ed.)Oskirko, V.O, A.N Zakharov, A.P Pavlov, А.А Solovyev, V.A Semenov, a S.V Rabotkin. "Hybrid HIPIMS+MFMS Power Supply for Dual Magnetron Sputtering Systems." Vacuum 181 (2020): 109670. https://doi.org/10.1016/j.vacuum.2020.109670.
Citácia podľa MLA (8th ed.)Oskirko, V.O, et al. "Hybrid HIPIMS+MFMS Power Supply for Dual Magnetron Sputtering Systems." Vacuum, vol. 181, 2020, p. 109670, https://doi.org/10.1016/j.vacuum.2020.109670.
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