A Metal Film Thickness Measurement System With a Large Range Based on High-Performance ME Sensors

The majority of traditional eddy current-based metal film thickness measurement systems measure the thickness of the metal film by detecting changes in the impedance or voltage of the detection coil, leading to limited measurement range and susceptibility to measurement errors caused by variations i...

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Veröffentlicht in:	IEEE/ASME transactions on mechatronics S. 1 - 10
Hauptverfasser:	Qiu, Yang, Shi, Lingshan, Yu, Guoliang, Zhu, Mingmin, Li, Yan, Wang, Jiawei, Zhang, Shulin, Ren, Kun, Zhou, Haomiao
Format:	Journal Article
Sprache:	Englisch
Veröffentlicht:	IEEE 2025
Schlagworte:	Coils Eddy currents Eddy-current Frequency measurement Magnetic sensors magnetoelectric (ME) sensors Magnetoelectric effects measurement range metal thickness measurement Metals noncontact measurement Semiconductor device measurement Sensors Thickness measurement Voltage measurement
ISSN:	1083-4435, 1941-014X
Online-Zugang:	Volltext
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