Influence of nano-sized horizontal inhomogeneities on surface profiling by means of XPS

Quantitative analysis of thin films surface is performed by means of X-ray electron spectroscopy (XPS) according to a calculation model assuming surface layers of the target to be homogeneous and parallel. However, almost every surface of an ultra-thin film is rough. A study of such surface using th...

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Bibliographic Details

Published in:	Nauchno-tekhnicheskiĭ vestnik informat͡s︡ionnykh tekhnologiĭ, mekhaniki i optiki Vol. 22; no. 6; pp. 1104 - 1111
Main Authors:	Lukyantsev, D.S., Lubenchenko, A.V., Ivanov, D.A., Lubenchenko, O.I., Fedotov, A.S.
Format:	Journal Article
Language:	English
Published:	ITMO University 01.12.2024
Subjects:	горизонтальные неоднородности наноразмерные пленки послойный фазовый анализ рфэс шероховатость поверхности
ISSN:	2226-1494, 2500-0373
Online Access:	Get full text
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