Influence of nano-sized horizontal inhomogeneities on surface profiling by means of XPS
Quantitative analysis of thin films surface is performed by means of X-ray electron spectroscopy (XPS) according to a calculation model assuming surface layers of the target to be homogeneous and parallel. However, almost every surface of an ultra-thin film is rough. A study of such surface using th...
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| Vydané v: | Nauchno-tekhnicheskiĭ vestnik informat͡s︡ionnykh tekhnologiĭ, mekhaniki i optiki Ročník 22; číslo 6; s. 1104 - 1111 |
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| Hlavní autori: | , , , , |
| Médium: | Journal Article |
| Jazyk: | English |
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ITMO University
01.12.2024
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| ISSN: | 2226-1494, 2500-0373 |
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| Abstract | Quantitative analysis of thin films surface is performed by means of X-ray electron spectroscopy (XPS) according to a calculation model assuming surface layers of the target to be homogeneous and parallel. However, almost every surface of an ultra-thin film is rough. A study of such surface using the plane-parallel layer model will lead to incorrect results. This work proposes to use the model of inhomogeneous stochastic nano-structured surface layer for ultra-thin film profiling. Surface stochastic nano-structured inhomogeneities are described by the normal Gauss distribution function. To determine these inhomogeneities, three parameters are specified: dispersion (spread of thicknesses by the layer), mean and maximal thickness of the surface layer. For the first time, the type of X-ray photoelectron spectrum of an inhomogeneous stochastic nano-structured surface is found that is determined by functions of photoelectron production and transmission through that surface layer. The designed model is based on the following assumptions: photoelectrons are produced in substance and travel straight-forward (Straight Line Approximation) along the surface, photoelectron flux density decreases in the layer according to the Bouguer–Lambert law, photoelectrons of different energies lose energy differently, photoelectron energy losses in bulk and on surface differ. Modeling of X-ray photoelectron spectra of an oxidized metal film is performed using different models: homogeneous plane-parallel layers, an island nano-structured surface layer and an inhomogeneous stochastic nano-structured surface layer. Ranges of applicability of plane-parallel layer models and simple periodical nano-structured island surface layer for inhomogeneous stochastic nano-structured surface profiling are determined. The model of homogeneous plane-parallel layers shows satisfactory profiling results by some values of parameters of an inhomogeneous stochastic surface layer. It is shown that the model of a simple periodically nano-structured island layer leads to inadequate results by profiling of an inhomogeneous stochastic surface. The investigation shows that for more accurate profiling of an inhomogeneous ultra-thin film, it is necessary to consider inhomogeneity of a real surface, otherwise the calculated results would not match the true profile. |
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| AbstractList | Quantitative analysis of thin films surface is performed by means of X-ray electron spectroscopy (XPS) according to a calculation model assuming surface layers of the target to be homogeneous and parallel. However, almost every surface of an ultra-thin film is rough. A study of such surface using the plane-parallel layer model will lead to incorrect results. This work proposes to use the model of inhomogeneous stochastic nano-structured surface layer for ultra-thin film profiling. Surface stochastic nano-structured inhomogeneities are described by the normal Gauss distribution function. To determine these inhomogeneities, three parameters are specified: dispersion (spread of thicknesses by the layer), mean and maximal thickness of the surface layer. For the first time, the type of X-ray photoelectron spectrum of an inhomogeneous stochastic nano-structured surface is found that is determined by functions of photoelectron production and transmission through that surface layer. The designed model is based on the following assumptions: photoelectrons are produced in substance and travel straight-forward (Straight Line Approximation) along the surface, photoelectron flux density decreases in the layer according to the Bouguer–Lambert law, photoelectrons of different energies lose energy differently, photoelectron energy losses in bulk and on surface differ. Modeling of X-ray photoelectron spectra of an oxidized metal film is performed using different models: homogeneous plane-parallel layers, an island nano-structured surface layer and an inhomogeneous stochastic nano-structured surface layer. Ranges of applicability of plane-parallel layer models and simple periodical nano-structured island surface layer for inhomogeneous stochastic nano-structured surface profiling are determined. The model of homogeneous plane-parallel layers shows satisfactory profiling results by some values of parameters of an inhomogeneous stochastic surface layer. It is shown that the model of a simple periodically nano-structured island layer leads to inadequate results by profiling of an inhomogeneous stochastic surface. The investigation shows that for more accurate profiling of an inhomogeneous ultra-thin film, it is necessary to consider inhomogeneity of a real surface, otherwise the calculated results would not match the true profile. |
| Author | Lukyantsev, D.S. Lubenchenko, O.I. Ivanov, D.A. Lubenchenko, A.V. Fedotov, A.S. |
| Author_xml | – sequence: 1 givenname: D.S. orcidid: 0000-0003-4350-8034 surname: Lukyantsev fullname: Lukyantsev, D.S. – sequence: 2 givenname: A.V. orcidid: 0000-0002-5998-5495 surname: Lubenchenko fullname: Lubenchenko, A.V. – sequence: 3 givenname: D.A. orcidid: 0000-0003-3760-0598 surname: Ivanov fullname: Ivanov, D.A. – sequence: 4 givenname: O.I. orcidid: 0000-0002-6317-2841 surname: Lubenchenko fullname: Lubenchenko, O.I. – sequence: 5 givenname: A.S. orcidid: 0000-0002-7641-3173 surname: Fedotov fullname: Fedotov, A.S. |
| BookMark | eNo9kMlKBDEQhoMouL5Dn7y1VrZO90WQwWVAUFDRW0h3KmOkJxmS8TDz9KbHBUIlf1H1Eb5jsh9iQELOKVxQJdvmkjHW1FR0ombAWF1OiRREKZTukSMmAWrgiu-X99_sITnL-RMAqCqFsSPyNg9u_MIwYBVdFUyIdfZbtNVHTH4bw9qMlQ8fcRkXGNCvPeYqhip_JWfKzipF50cfFlW_qZZoQp4w70_Pp-TAmTHj2e99Ql5vb15m9_XD4918dv1QD1QpWvftAApaZRkFFIPoHbWSKSe57Juua7BrQXVooZddKygXFoYWDJcobaMA-QmZ_3BtNJ96lfzSpI2OxutdI6aFNmnthxG1dcbygUPTSClAQMutMM5i-YKRFFlhXf2whhRzTuj-eRT0zrqeTOrJpJ6sl6hLLNb1ZJ1_A14SdwQ |
| ContentType | Journal Article |
| DBID | AAYXX CITATION DOA |
| DOI | 10.17586/2226-1494-2022-22-6-1104-1111 |
| DatabaseName | CrossRef DOAJ Directory of Open Access Journals |
| DatabaseTitle | CrossRef |
| DatabaseTitleList | |
| Database_xml | – sequence: 1 dbid: DOA name: DOAJ Directory of Open Access Journals url: https://www.doaj.org/ sourceTypes: Open Website |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering |
| EISSN | 2500-0373 |
| EndPage | 1111 |
| ExternalDocumentID | oai_doaj_org_article_dfad3c306655404083d4afde8c0a51e2 10_17586_2226_1494_2022_22_6_1104_1111 |
| GroupedDBID | 642 AAYXX ADBBV AFKRA ALMA_UNASSIGNED_HOLDINGS BCNDV BENPR BPHCQ BYOGL CITATION GROUPED_DOAJ KQ8 PIMPY PQQKQ PROAC VCL VIT |
| ID | FETCH-LOGICAL-c1771-b8c07087d210e4c4bf1d527f535b6996e98079ed0b5984134d0c80a35e5d670e3 |
| IEDL.DBID | DOA |
| ISSN | 2226-1494 |
| IngestDate | Mon Nov 03 22:07:14 EST 2025 Sat Nov 29 03:57:45 EST 2025 |
| IsDoiOpenAccess | true |
| IsOpenAccess | true |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 6 |
| Language | English |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-LOGICAL-c1771-b8c07087d210e4c4bf1d527f535b6996e98079ed0b5984134d0c80a35e5d670e3 |
| ORCID | 0000-0003-3760-0598 0000-0002-5998-5495 0000-0003-4350-8034 0000-0002-7641-3173 0000-0002-6317-2841 |
| OpenAccessLink | https://doaj.org/article/dfad3c306655404083d4afde8c0a51e2 |
| PageCount | 8 |
| ParticipantIDs | doaj_primary_oai_doaj_org_article_dfad3c306655404083d4afde8c0a51e2 crossref_primary_10_17586_2226_1494_2022_22_6_1104_1111 |
| PublicationCentury | 2000 |
| PublicationDate | 2024-12-01 |
| PublicationDateYYYYMMDD | 2024-12-01 |
| PublicationDate_xml | – month: 12 year: 2024 text: 2024-12-01 day: 01 |
| PublicationDecade | 2020 |
| PublicationTitle | Nauchno-tekhnicheskiĭ vestnik informat͡s︡ionnykh tekhnologiĭ, mekhaniki i optiki |
| PublicationYear | 2024 |
| Publisher | ITMO University |
| Publisher_xml | – name: ITMO University |
| SSID | ssj0001700022 ssib026971427 |
| Score | 2.275723 |
| Snippet | Quantitative analysis of thin films surface is performed by means of X-ray electron spectroscopy (XPS) according to a calculation model assuming surface layers... |
| SourceID | doaj crossref |
| SourceType | Open Website Index Database |
| StartPage | 1104 |
| SubjectTerms | горизонтальные неоднородности наноразмерные пленки послойный фазовый анализ рфэс шероховатость поверхности |
| Title | Influence of nano-sized horizontal inhomogeneities on surface profiling by means of XPS |
| URI | https://doaj.org/article/dfad3c306655404083d4afde8c0a51e2 |
| Volume | 22 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| journalDatabaseRights | – providerCode: PRVAON databaseName: DOAJ Directory of Open Access Journals customDbUrl: eissn: 2500-0373 dateEnd: 99991231 omitProxy: false ssIdentifier: ssj0001700022 issn: 2226-1494 databaseCode: DOA dateStart: 20010101 isFulltext: true titleUrlDefault: https://www.doaj.org/ providerName: Directory of Open Access Journals |
| link | http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwrV3PS8MwFA4yRPQg_sT5ixzEW1nTpk16VFEUZAxU3K00zQursEa6TXB_vS9tN-rJi1AKCSSE773mvY-k3yPkCgyoTAahB0pJDyOe9lRg8CU5V7FBzqVrEddnMRzK8TgZdUp9uTthjTxwA9xAm0yHeehOCDC54JgxaJ4ZDTL3s4hBvfv6IumQKfSkIE4E462-5UcjEuOilas0h_mGh7SAb5Frt2NgvhwP1p3oNEjO8MEmc4p-jLFfEasj7F9HoIc9stumjvSmWfI-2YDygOx0BAUPyfvTquYItYaWWWm9WbEETSe2KpbW_flIi3Jipxb9BmoxVWpLOltUJsMxTQFvnImqbzoFjGJumvHo5Yi8Pdy_3j16bekEL2dCMIQ6x29ZCo2MDnjOlWE6CoSJwkjFSHEgkQgaaF9FicQ4xrWfSz8LI4h0LHwIj0mvtCWcEKoCIVTAY-BMIUI6SxIThCYWJmEAAe8TsYIn_WwUMlLHLBywqQM2dcCmDlhspthEYGvi0Se3Ds31KKd0XXeg_dPW_ulf9j_9j0nOyDaujzfXVM5Jb14t4IJs5l_zYlZd1q71A_GXy2Q |
| linkProvider | Directory of Open Access Journals |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Influence+of+nano-sized+horizontal+inhomogeneities+on+surface+profiling+by+means+of+XPS&rft.jtitle=Nauchno-tekhnicheski%C4%AD+vestnik+informat%CD%A1s%EF%B8%A1ionnykh+tekhnologi%C4%AD%2C+mekhaniki+i+optiki&rft.au=D.+S.+Lukyantsev&rft.au=A.+V.+Lubenchenko&rft.au=D.+A.+Ivanov&rft.au=O.+I.+Lubenchenko&rft.date=2024-12-01&rft.pub=ITMO+University&rft.issn=2226-1494&rft.eissn=2500-0373&rft.volume=22&rft.issue=6&rft.spage=1104&rft.epage=1111&rft_id=info:doi/10.17586%2F2226-1494-2022-22-6-1104-1111&rft.externalDBID=DOA&rft.externalDocID=oai_doaj_org_article_dfad3c306655404083d4afde8c0a51e2 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=2226-1494&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=2226-1494&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=2226-1494&client=summon |