3D Nanolithography via Holographic Multi‐Focus Metalens (Laser Photonics Rev. 18(11)/2024)

3D Nanolithography via Holographic Multi‐Focus Metalens In article number 2400181, Xinger Wang, Hui Gao, Wei Xiong, and co‐workers propose a metasurface‐based two‐photon polymerization technique. A metasurface is introduced into 3D nanolithography for the first time, resulting in the construction of...

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Veröffentlicht in:Laser & photonics reviews Jg. 18; H. 11
Hauptverfasser: Wang, Xinger, Fan, Xuhao, Liu, Yuncheng, Xu, Ke, Zhou, Yining, Zhang, Zexu, Chen, Fayu, Yu, Xuan, Deng, Leimin, Gao, Hui, Xiong, Wei
Format: Journal Article
Sprache:Englisch
Veröffentlicht: Weinheim Wiley Subscription Services, Inc 01.11.2024
Schlagworte:
Holography
Metasurfaces
Nanolithography
Parallel processing
Photons
ISSN:1863-8880, 1863-8899
Online-Zugang:Volltext
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Zusammenfassung:3D Nanolithography via Holographic Multi‐Focus Metalens In article number 2400181, Xinger Wang, Hui Gao, Wei Xiong, and co‐workers propose a metasurface‐based two‐photon polymerization technique. A metasurface is introduced into 3D nanolithography for the first time, resulting in the construction of a miniaturized and simplified two‐photon lithography system that achieves efficient multi‐focus parallel processing with high uniformity. It is believed that the utilization of the metasurface will provide a novel two‐photon lithography operating platform, enabling richer and more flexible printing functionalities while maintaining system miniaturization and low cost.
Bibliographie:ObjectType-Article-1
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ISSN:1863-8880
1863-8899
DOI:10.1002/lpor.202470065