Metal-Catalyzed Electroless Etching of Silicon in Aerated HF/H2O Vapor for Facile Fabrication of Silicon Nanostructures

Inspired by metal corrosion in air, we demonstrate that metal-catalyzed electroless etching (MCEE) of silicon can be performed simply in aerated HF/H2O vapor for facile fabrication of three-dimensional silicon nanostructures such as silicon nanowires (SiNW) arrays. Compared to MCEE commonly performe...

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Veröffentlicht in:	Nano letters Jg. 14; H. 8; S. 4212 - 4219
Hauptverfasser:	Hu, Ya, Peng, Kui-Qing, Qiao, Zhen, Huang, Xing, Zhang, Fu-Qiang, Sun, Rui-Nan, Meng, Xiang-Min, Lee, Shuit-Tong
Format:	Journal Article
Sprache:	Englisch
Veröffentlicht:	Washington, DC American Chemical Society 13.08.2014
Schlagworte:	Catalytic methods Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science; rheology Exact sciences and technology Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties Materials science Methods of nanofabrication Nanocrystalline materials Nanoscale materials and structures: fabrication and characterization Physics Quantum wires Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) gas phase etching electrochemistry galvanic etching Silicon nanowire Catalysts Corrosion Aqueous solutions Hafnium Etching Silicon Nanowires Nanostructures Arrays Flexibility Nanostructured materials
ISSN:	1530-6984, 1530-6992, 1530-6992
Online-Zugang:	Volltext
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