Efficient mixed-domain analysis of electrostatic MEMS

We present efficient computational methods for scattered point and meshless analysis of electrostatic microelectromechanical systems (MEMS). Electrostatic MEMS are governed by coupled mechanical and electrostatic energy domains. A self-consistent analysis of electrostatic MEMS is implemented by comb...

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Bibliographic Details
Published in:Digest of technical papers - IEEE/ACM International Conference on Computer-Aided Design pp. 474 - 477
Main Authors: Li, Gang, Aluru, N. R.
Format: Conference Proceeding
Language:English
Published: New York, NY, USA ACM 10.11.2002
IEEE
Series:ACM Conferences
Subjects:
Applied computing > Physical sciences and engineering > Electronics
Applied sciences
Computer systems organization
Computing methodologies > Modeling and simulation > Model development and analysis
Design. Technologies. Operation analysis. Testing
Dielectric, amorphous and glass solid devices
Electronics
Exact sciences and technology
Integrated circuits
Mathematics of computing > Mathematical analysis > Numerical analysis > Interpolation
Micro- and nanoelectromechanical devices (mems/nems)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Software and its engineering > Software notations and tools > System description languages
meshless
Lagrangian electrostatics
finite cloud method
boundary cloud method
coupled electro-mechanical analysis
Finite element method
Circuit design
Self consistency
Numerical method
Fast algorithm
Computer aided design
Microelectromechanical device
Electrostatic devices
Boundary element method
ISBN:0780376072, 9780780376076
ISSN:1092-3152
Online Access:Get full text
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Summary:We present efficient computational methods for scattered point and meshless analysis of electrostatic microelectromechanical systems (MEMS). Electrostatic MEMS are governed by coupled mechanical and electrostatic energy domains. A self-consistent analysis of electrostatic MEMS is implemented by combining a finite cloud method based interior mechanical analysis with a boundary cloud method based exterior electrostatic analysis. Lagrangian descriptions are used for both mechanical and electrostatic analyses. Meshless finite cloud and boundary cloud methods combined with fast algorithms and Lagrangian descriptions are flexible, efficient and attractive alternatives compared to conventional finite element/boundary element methods for self-consistent electromechanical analysis. Numerical results are presented for an electrostatic comb drive device.
Bibliography:SourceType-Conference Papers & Proceedings-1
ObjectType-Conference Paper-1
content type line 25
ISBN:0780376072
9780780376076
ISSN:1092-3152
DOI:10.1145/774572.774641