Efficient mixed-domain analysis of electrostatic MEMS

We present efficient computational methods for scattered point and meshless analysis of electrostatic microelectromechanical systems (MEMS). Electrostatic MEMS are governed by coupled mechanical and electrostatic energy domains. A self-consistent analysis of electrostatic MEMS is implemented by comb...

Celý popis

Uloženo v:

Podrobná bibliografie
Vydáno v:	Digest of technical papers - IEEE/ACM International Conference on Computer-Aided Design s. 474 - 477
Hlavní autoři:	Li, Gang, Aluru, N. R.
Médium:	Konferenční příspěvek
Jazyk:	angličtina
Vydáno:	New York, NY, USA ACM 10.11.2002 IEEE
Edice:	ACM Conferences
Témata:	Applied computing > Physical sciences and engineering > Electronics Applied sciences Computer systems organization Computing methodologies > Modeling and simulation > Model development and analysis Design. Technologies. Operation analysis. Testing Dielectric, amorphous and glass solid devices Electronics Exact sciences and technology Integrated circuits Mathematics of computing > Mathematical analysis > Numerical analysis > Interpolation Micro- and nanoelectromechanical devices (mems/nems) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Software and its engineering > Software notations and tools > System description languages meshless Lagrangian electrostatics finite cloud method boundary cloud method coupled electro-mechanical analysis Finite element method Circuit design Self consistency Numerical method Fast algorithm Computer aided design Microelectromechanical device Electrostatic devices Boundary element method
ISBN:	0780376072, 9780780376076
ISSN:	1092-3152
On-line přístup:	Získat plný text
Tagy:	Přidat tag Žádné tagy, Buďte první, kdo vytvoří štítek k tomuto záznamu!

Buďte první, kdo okomentuje tento záznam!