Efficient mixed-domain analysis of electrostatic MEMS
We present efficient computational methods for scattered point and meshless analysis of electrostatic microelectromechanical systems (MEMS). Electrostatic MEMS are governed by coupled mechanical and electrostatic energy domains. A self-consistent analysis of electrostatic MEMS is implemented by comb...
Uložené v:
| Vydané v: | Digest of technical papers - IEEE/ACM International Conference on Computer-Aided Design s. 474 - 477 |
|---|---|
| Hlavní autori: | , |
| Médium: | Konferenčný príspevok.. |
| Jazyk: | English |
| Vydavateľské údaje: |
New York, NY, USA
ACM
10.11.2002
IEEE |
| Edícia: | ACM Conferences |
| Predmet: | |
| ISBN: | 0780376072, 9780780376076 |
| ISSN: | 1092-3152 |
| On-line prístup: | Získať plný text |
| Tagy: |
Pridať tag
Žiadne tagy, Buďte prvý, kto otaguje tento záznam!
|
| Abstract | We present efficient computational methods for scattered point and meshless analysis of electrostatic microelectromechanical systems (MEMS). Electrostatic MEMS are governed by coupled mechanical and electrostatic energy domains. A self-consistent analysis of electrostatic MEMS is implemented by combining a finite cloud method based interior mechanical analysis with a boundary cloud method based exterior electrostatic analysis. Lagrangian descriptions are used for both mechanical and electrostatic analyses. Meshless finite cloud and boundary cloud methods combined with fast algorithms and Lagrangian descriptions are flexible, efficient and attractive alternatives compared to conventional finite element/boundary element methods for self-consistent electromechanical analysis. Numerical results are presented for an electrostatic comb drive device. |
|---|---|
| AbstractList | We present efficient computational methods for scattered point and meshless analysis of electrostatic microelectromechanical systems (MEMS). Electrostatic MEMS are governed by coupled mechanical and electrostatic energy domains. A self-consistent analysis of electrostatic MEMS is implemented by combining a finite cloud method based interior mechanical analysis with a boundary cloud method based exterior electrostatic analysis. Lagrangian descriptions are used for both mechanical and electrostatic analyses. Meshless finite cloud and boundary cloud methods combined with fast algorithms and Lagrangian descriptions are flexible, efficient and attractive alternatives compared to conventional finite element/boundary element methods for self-consistent electromechanical analysis. Numerical results are presented for an electrostatic comb drive device. |
| Author | Aluru, N. R. Li, Gang |
| Author_xml | – sequence: 1 givenname: Gang surname: Li fullname: Li, Gang organization: University of Illinois at Urbana-Champaign, Urbana, IL – sequence: 2 givenname: N. R. surname: Aluru fullname: Aluru, N. R. organization: University of Illinois at Urbana-Champaign, Urbana, IL |
| BackLink | http://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=15672174$$DView record in Pascal Francis |
| BookMark | eNqNkDtPwzAUhS1RJNrSkT0LTKT4xnYcj6gqD6kVAzBbN35IhiQucSrRf09QK7FylrN8OtL5ZmTSxc4RcgV0CcDFnZRcyGI5VsnhjMyorCiTJZXFhEyBqiJnIIoLskjpg47hgpalmhKx9j6Y4Loha8O3s7mNLYYuww6bQwopiz5zjTNDH9OAQzDZdr19vSTnHpvkFqeek_eH9dvqKd-8PD6v7jc5gpJDbi23tWRYUQkMmFCgPHUVs6LyvKhVqazykllDnamYR8ZYTSs_UkI665DNyc1xd9fHr71Lg25DMq5psHNxnzQDkOO5cgSvTyAmg43vsTMh6V0fWuwPGkQpC5D8bxBNq-sYP5MGqn8N6qNBfTQ4grf_AnXdB-fZD8Frb14 |
| ContentType | Conference Proceeding |
| Copyright | 2002 ACM 2004 INIST-CNRS |
| Copyright_xml | – notice: 2002 ACM – notice: 2004 INIST-CNRS |
| DBID | IQODW 7SC 8FD JQ2 L7M L~C L~D |
| DOI | 10.1145/774572.774641 |
| DatabaseName | Pascal-Francis Computer and Information Systems Abstracts Technology Research Database ProQuest Computer Science Collection Advanced Technologies Database with Aerospace Computer and Information Systems Abstracts Academic Computer and Information Systems Abstracts Professional |
| DatabaseTitle | Computer and Information Systems Abstracts Technology Research Database Computer and Information Systems Abstracts – Academic Advanced Technologies Database with Aerospace ProQuest Computer Science Collection Computer and Information Systems Abstracts Professional |
| DatabaseTitleList | Computer and Information Systems Abstracts |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Applied Sciences Engineering |
| EndPage | 477 |
| ExternalDocumentID | 15672174 |
| Genre | Conference Paper |
| GroupedDBID | 6IE 6IH 6IK 6IL AAJGR AAVQY ACM ADPZR ALMA_UNASSIGNED_HOLDINGS APO BEFXN BFFAM BGNUA BKEBE BPEOZ CBEJK GUFHI LHSKQ OCL RIB RIC RIE RIL RIO 123 6IF 6IN AAWTH ABLEC ADZIZ CHZPO FEDTE IEGSK IJVOP IQODW M43 7SC 8FD JQ2 L7M L~C L~D |
| ID | FETCH-LOGICAL-a197t-dd4db73a80713135919f0e83d58f42b969d9f73dc0ec83fa333b08f19f57edea3 |
| ISBN | 0780376072 9780780376076 |
| ISSN | 1092-3152 |
| IngestDate | Fri Jul 11 04:28:28 EDT 2025 Tue Mar 18 02:08:18 EDT 2025 Sun Dec 01 06:31:10 EST 2024 Wed Jan 31 06:42:12 EST 2024 |
| IsPeerReviewed | false |
| IsScholarly | false |
| Keywords | meshless Lagrangian electrostatics finite cloud method boundary cloud method coupled electro-mechanical analysis Finite element method Circuit design Self consistency Numerical method Fast algorithm Computer aided design Microelectromechanical device Electrostatic devices Boundary element method |
| Language | English |
| License | Permission to make digital or hard copies of all or part of this work for personal or classroom use is granted without fee provided that copies are not made or distributed for profit or commercial advantage and that copies bear this notice and the full citation on the first page. Copyrights for components of this work owned by others than ACM must be honored. Abstracting with credit is permitted. To copy otherwise, or republish, to post on servers or to redistribute to lists, requires prior specific permission and/or a fee. Request permissions from Permissions@acm.org CC BY 4.0 |
| LinkModel | OpenURL |
| MeetingName | ICCAD02: 2002 IEEE / ACM International Conference on Computer Aided Design |
| MergedId | FETCHMERGED-LOGICAL-a197t-dd4db73a80713135919f0e83d58f42b969d9f73dc0ec83fa333b08f19f57edea3 |
| Notes | SourceType-Conference Papers & Proceedings-1 ObjectType-Conference Paper-1 content type line 25 |
| PQID | 31171096 |
| PQPubID | 23500 |
| PageCount | 4 |
| ParticipantIDs | acm_books_10_1145_774572_774641 acm_books_10_1145_774572_774641_brief pascalfrancis_primary_15672174 proquest_miscellaneous_31171096 |
| PublicationCentury | 2000 |
| PublicationDate | 20021110 2002 |
| PublicationDateYYYYMMDD | 2002-11-10 2002-01-01 |
| PublicationDate_xml | – month: 11 year: 2002 text: 20021110 day: 10 |
| PublicationDecade | 2000 |
| PublicationPlace | New York, NY, USA |
| PublicationPlace_xml | – name: New York, NY, USA – name: Piscataway NJ |
| PublicationSeriesTitle | ACM Conferences |
| PublicationTitle | Digest of technical papers - IEEE/ACM International Conference on Computer-Aided Design |
| PublicationYear | 2002 |
| Publisher | ACM IEEE |
| Publisher_xml | – name: ACM – name: IEEE |
| SSID | ssj0000450669 ssj0020286 |
| Score | 1.3267876 |
| Snippet | We present efficient computational methods for scattered point and meshless analysis of electrostatic microelectromechanical systems (MEMS). Electrostatic MEMS... |
| SourceID | proquest pascalfrancis acm |
| SourceType | Aggregation Database Index Database Publisher |
| StartPage | 474 |
| SubjectTerms | Applied computing -- Physical sciences and engineering -- Electronics Applied sciences Computer systems organization Computing methodologies -- Modeling and simulation -- Model development and analysis Design. Technologies. Operation analysis. Testing Dielectric, amorphous and glass solid devices Electronics Exact sciences and technology Integrated circuits Mathematics of computing -- Mathematical analysis -- Numerical analysis -- Interpolation Micro- and nanoelectromechanical devices (mems/nems) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Software and its engineering -- Software notations and tools -- System description languages |
| Title | Efficient mixed-domain analysis of electrostatic MEMS |
| URI | https://www.proquest.com/docview/31171096 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwtV3Pb9MwFLZg4sANxCYKY-SwnSaPJP4VHzigqcBhnSY0pN0sJ7alSDSdmhb1z-e9OGnaDWniwCVtoyix3vfqPD9_73uEnKYaM43c0iCVozyUilpV5hSJ7qkoJQYBXbMJdX1d3N3pm75lXdu1E1BNU2w2-v6_Qg3nAGwsnf0HuLc3hRPwHUCHI8AOxwcR8V9fPrh6Q5GEy9mDbN9Y24cbBEM3B_qldh7JyEjkQH3BfNeJpp3ABNIF5vXGO-oWc1sjfXlUMun76GBhUl2dz6ZjkvuqIwp8s_3w0Kt-rZfrWN91_uMiTmgotNx-xuGOA9zPReS048PteM9sXJ5C7JEi4yZ25unnRx5b8vSvWh47uDyexTkKXkBgKlR-AR8SlQmeK5XG-rxtDg3CUYiYdJeNGR7WiyoNv-Wgq8rFp70bYjRSzZEKa1v4N4TYxuTRG7kLM25fkcPRBsnNFt3X5Jlv3hCxRSPZRSMZ0EgWIdlDI0E0DsnPr9Pby--073pBbabVijrHXamYLTB_kDGhMx1SXzAnisDzUkvtdFDMVamvChYsY6xMiwBXCeWdt-yIHDSLxr8lic2c5spZ6yQEK5xrqbzOi-CqHLen1YR8BBsYdN7WxAp1YaKVTLTShJw9cYUpwU3ChJzs2dHcR60UkwmpcNULjxoMa2ACw10p2_jFujUsy5APLN89OZj35OXodMfkYLVc-w_kRfV7VbfLk841_gDKVFhs |
| linkProvider | IEEE |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.genre=proceeding&rft.title=IEEE%2FACM+International+Conference+on+Computer-Aided+Design+2002&rft.atitle=Efficient+mixed-domain+analysis+of+electrostatic+MEMS&rft.au=Li%2C+Gang&rft.au=Aluru%2C+N.+R.&rft.series=ACM+Conferences&rft.date=2002-11-10&rft.pub=ACM&rft.isbn=0780376072&rft.spage=474&rft.epage=477&rft_id=info:doi/10.1145%2F774572.774641 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1092-3152&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1092-3152&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1092-3152&client=summon |