Zheng, S., Liang, X., Yu, Z., Ma, Y., Yu, B., & Wong, M. (2025, June 22). Curvilinear Optical Proximity Correction via Cardinal Spline. 2025 62nd ACM/IEEE Design Automation Conference (DAC), 1-7. https://doi.org/10.1109/DAC63849.2025.11133367
Chicago-Zitierstil (17. Ausg.)Zheng, Su, Xiaoxiao Liang, Ziyang Yu, Yuzhe Ma, Bei Yu, und Martin Wong. "Curvilinear Optical Proximity Correction via Cardinal Spline." 2025 62nd ACM/IEEE Design Automation Conference (DAC) 22 Jun. 2025: 1-7. https://doi.org/10.1109/DAC63849.2025.11133367.
MLA-Zitierstil (9. Ausg.)Zheng, Su, et al. "Curvilinear Optical Proximity Correction via Cardinal Spline." 2025 62nd ACM/IEEE Design Automation Conference (DAC), 22 Jun. 2025, pp. 1-7, https://doi.org/10.1109/DAC63849.2025.11133367.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.