Search Results - "etching process control algorithm"

Automatic speed control system for the chemical etching of thin films by Dalekorej, A.V., Ivanytsky, V.P., Kryuchyn, A.A., Legeta, Ya.P., Petrov, V.V., Rubish, V.M., Ryaboshchuk, M.M., Chychura, I.I.

“…The possibility of creating automatic control systems based on the interferometric optical method for chemical etching processes has been shown. A structural…”
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