Výsledky vyhledávání - "Multiscale computational fluid dynamics modeling"

Integration of on-line machine learning-based endpoint control and run-to-run control for an atomic layer etching process Autor Wang, Henrik, Ou, Feiyang, Suherman, Julius, Orkoulas, Gerassimos, Christofides, Panagiotis D.

“…Control methods for Atomic Layer Etching (ALE) processes are constantly evolving due to the increasing level of precision needed to manufacture next-gen…”
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Multiscale computational fluid dynamics modeling of an area-selective atomic layer deposition process using a discrete feed method Autor Wang, Henrik, Tom, Matthew, Ou, Feiyang, Orkoulas, Gerassimos, Christofides, Panagiotis D.

“…Area-selective atomic layer deposition (AS-ALD) is a beneficial procedure that facilitates self-alignment for transistor stacking by concentrating oxide growth…”
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