Search Results - "Multiscale computational fluid dynamics modeling"

Multiscale computational fluid dynamics modeling of thermal atomic layer etching: Application to chamber configuration design by Yun, Sungil, Tom, Matthew, Ou, Feiyang, Orkoulas, Gerassimos, Christofides, Panagiotis D.

“…•Multiscale model of thermal atomic layer etching.•Computational fluid dynamics modeling of the gas phase.•Kinetic Monte–Carlo modeling of etching…”
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Multiscale computational fluid dynamics modeling of thermal atomic layer deposition with application to chamber design by Zhang, Yichi, Ding, Yangyao, Christofides, Panagiotis D.

“…[Display omitted] •Computational fluid dynamics modeling of ALD gas phase.•Multiscale CFD modeling of entire ALD chamber.•Numerical analysis of multiscale CFD…”
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Multiscale computational fluid dynamics modeling of spatial thermal atomic layer etching by Yun, Sungil, Tom, Matthew, Orkoulas, Gerassimos, Christofides, Panagiotis D.

“…•Multiscale model of spatial thermal atomic layer etching.•Computational fluid dynamics modeling of the gas phase.•Kinetic Monte-Carlo modeling of etching…”
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Multiscale computational fluid dynamics modeling and reactor design of plasma-enhanced atomic layer deposition by Zhang, Yichi, Ding, Yangyao, Christofides, Panagiotis D.

“…Plasma-enhanced atomic layer deposition (PEALD) is one of the most widely adopted deposition methods in the semiconductor industry. It is chosen largely due to…”
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Multiscale Computational Fluid Dynamics Modeling for Personalized Liver Cancer Radioembolization Dosimetry by Taebi, Amirtahà, Vu, Catherine T, Roncali, Emilie

“…Yttrium-90 (90Y) radioembolization is a minimally invasive procedure increasingly used for advanced liver cancer treatment. In this method, radioactive…”
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Multiscale computational fluid dynamics modeling of an area-selective atomic layer deposition process using a discrete feed method by Wang, Henrik, Tom, Matthew, Ou, Feiyang, Orkoulas, Gerassimos, Christofides, Panagiotis D.

“… Thus, this work proposes a multiscale computational fluid dynamics modeling framework that simultaneously describes the surface chemistry and ambient fluid behavior for an Al2O3/SiO2 substrate…”
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Multiscale Computational Fluid Dynamics Modeling of Thermal Atomic Layer Etching: Application to Chamber Configuration Design by Tom, Matthew Cheuk-Woh

“…In recent years, increasing demand for microchips have been fueled by the rise of nano scale technologies that are difficult to fabricate. Atomic layer etching…”
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Integration of on-line machine learning-based endpoint control and run-to-run control for an atomic layer etching process by Wang, Henrik, Ou, Feiyang, Suherman, Julius, Orkoulas, Gerassimos, Christofides, Panagiotis D.

“…Control methods for Atomic Layer Etching (ALE) processes are constantly evolving due to the increasing level of precision needed to manufacture next-gen…”
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Multiscale Computational Fluid Dynamics Modeling of Thermal and Plasma Atomic Layer Deposition: Application to Chamber Design and Process Control by Zhang, Yichi

“…Facilitated by the increasing importance and demand of semiconductors for the smart phone and even the automobile industry, thermal atomic layer deposition…”
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Multiscale Computational Fluid Dynamics Modeling of Thermal Atomic Layer Deposition with Application to Chamber Design by Zhang, Yichi

“…This work develops a first-principles-based three-dimensional, multiscale computational fluid dynamics (CFD) model, together with reactor geometry…”
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Multiscale Computational Fluid Dynamics Modeling: Parallelization and Application to Design and Control of Plasma-Enhanced Chemical Vapor Deposition of Thin Film Solar Cells by Crose, Marquis Grant

“…Today, plasma-enhanced chemical vapor deposition (PECVD) remains the dominant processing method for the manufacture of silicon thin films due to inexpensive…”
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Multiscale computational fluid dynamics modelling of spatial ALD on porous li-ion battery electrodes by Li, Zoushuang, Chen, Yuanxiao, Nie, Yufeng, Yang, Fan, Liu, Xiao, Gao, Yuan, Shan, Bin, Chen, Rong

“…•A multiscale model is established to study the spatial ALD on porous electrodes.•The macro-scale CFD and pore-scale diffusion–reaction kinetics are coupled.•A…”
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Multivariable run-to-run control of thermal atomic layer etching of aluminum oxide thin films by Yun, Sungil, Tom, Matthew, Ou, Feiyang, Orkoulas, Gerassimos, Christofides, Panagiotis D.

“…With the growing scarcity of semiconducting devices stemming from volatile prices, shortened supplies, and increased demand that are attributed to the Covid-19…”
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First-Principles and Multiscale Modeling for Design and Operation of Atomic Layer Processing by Yun, Sungil

“…There has been growing demand for high performance nanochips due to the Fourth Industrial Revolution. However, semiconductor manufacturing leaders are…”
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Economic Model Predictive Control: Handling Preventive Actuator and Sensor Maintenance and Application to Transport-Reaction Processes by Lao, Liangfeng

“…In chemical process industries, maintenance costs may comprise of up to 20?30% of the operating budget, and therefore, improving maintenance practices can…”
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