Search Results - Multiscale computational fluid dynamics modeling

Multiscale computational fluid dynamics modeling of thermal atomic layer etching: Application to chamber configuration design by Yun, Sungil, Tom, Matthew, Ou, Feiyang, Orkoulas, Gerassimos, Christofides, Panagiotis D.

“…•Multiscale model of thermal atomic layer etching.•Computational fluid dynamics modeling of the gas phase.•Kinetic Monte…”
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Multiscale computational fluid dynamics modeling of spatial thermal atomic layer etching by Yun, Sungil, Tom, Matthew, Orkoulas, Gerassimos, Christofides, Panagiotis D.

“…•Multiscale model of spatial thermal atomic layer etching.•Computational fluid dynamics modeling of the gas phase…”
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Multiscale computational fluid dynamics modeling of thermal atomic layer deposition with application to chamber design by Zhang, Yichi, Ding, Yangyao, Christofides, Panagiotis D.

“…[Display omitted] •Computational fluid dynamics modeling of ALD gas phase.•Multiscale CFD modeling of entire ALD chamber…”
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Multiscale computational fluid dynamics modeling and reactor design of plasma-enhanced atomic layer deposition by Zhang, Yichi, Ding, Yangyao, Christofides, Panagiotis D.

“…Plasma-enhanced atomic layer deposition (PEALD) is one of the most widely adopted deposition methods in the semiconductor industry. It is chosen largely due to…”
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Multiscale Computational Fluid Dynamics Modeling for Personalized Liver Cancer Radioembolization Dosimetry by Taebi, Amirtahà, Vu, Catherine T, Roncali, Emilie

“… In this work, we present a computational model to predict the radiation dose from the 90Y…”
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A fully coupled computational fluid dynamics – agent-based model of atherosclerotic plaque development: Multiscale modeling framework and parameter sensitivity analysis by Corti, Anna, Chiastra, Claudio, Colombo, Monika, Garbey, Marc, Migliavacca, Francesco, Casarin, Stefano

“… The framework was based on the coupling of Computational Fluid Dynamics (CFD) simulations with an Agent…”
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Multiscale computational fluid dynamics modelling of spatial ALD on porous li-ion battery electrodes by Li, Zoushuang, Chen, Yuanxiao, Nie, Yufeng, Yang, Fan, Liu, Xiao, Gao, Yuan, Shan, Bin, Chen, Rong

“… As a strong-coupled multiscale process, various process conditions and microstructure parameters have great influences on the macroscale fluid dynamics and the pore…”
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Multiscale computational fluid dynamics modeling of an area-selective atomic layer deposition process using a discrete feed method by Wang, Henrik, Tom, Matthew, Ou, Feiyang, Orkoulas, Gerassimos, Christofides, Panagiotis D.

“… Thus, this work proposes a multiscale computational fluid dynamics modeling framework that simultaneously describes the surface chemistry and ambient fluid behavior for an Al2O3/SiO2 substrate…”
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Multiscale Computational Fluid Dynamics Modeling of Thermal Atomic Layer Etching: Application to Chamber Configuration Design by Tom, Matthew Cheuk-Woh

“…; however, these experiments can be costly and time-consuming. Therefore, this work aims to develop a multiscale computational fluid dynamics (CFD…”
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Recent advances in multiscale CFD modelling of cooling processes and systems for the agrifood industry by Ajani, Clement Kehinde, Zhu, Zhiwei, Sun, Da-Wen

“… Recently, as a result of increased computational capacity, multiscale computational fluid dynamics (CFD…”
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Integration of on-line machine learning-based endpoint control and run-to-run control for an atomic layer etching process by Wang, Henrik, Ou, Feiyang, Suherman, Julius, Orkoulas, Gerassimos, Christofides, Panagiotis D.

“…Control methods for Atomic Layer Etching (ALE) processes are constantly evolving due to the increasing level of precision needed to manufacture next-gen…”
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Multiscale Computational Fluid Dynamics Modeling of Thermal and Plasma Atomic Layer Deposition: Application to Chamber Design and Process Control by Zhang, Yichi

“…Facilitated by the increasing importance and demand of semiconductors for the smart phone and even the automobile industry, thermal atomic layer deposition…”
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Multiscale Modeling of Expanding Polyurethane Foams via Computational Fluid Dynamics and Population Balance Equation by Karimi, Mohsen, Droghetti, Hermes, Marchisio, Daniele L.

“… The model is formulated upon coupling of Computational Fluid Dynamics (CFD) and Population Balance Equation (PBE…”
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Efficient bi-directional coupling of 3D computational fluid-particle dynamics and 1D Multiple Path Particle Dosimetry lung models for multiscale modeling of aerosol dosimetry by Kuprat, A.P., Jalali, M., Jan, T., Corley, R.A., Asgharian, B., Price, O., Singh, R.K., Colby, S., Darquenne, C.

“… Computational fluid-particle dynamics (CFPD) models provide site-specific predictions but at a computational cost that prohibits whole lung predictions…”
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Multiscale Computational Fluid Dynamics Modeling of Thermal Atomic Layer Deposition with Application to Chamber Design by Zhang, Yichi

“…This work develops a first-principles-based three-dimensional, multiscale computational fluid dynamics (CFD…”
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Multiscale Computational Fluid Dynamics Modeling: Parallelization and Application to Design and Control of Plasma-Enhanced Chemical Vapor Deposition of Thin Film Solar Cells by Crose, Marquis Grant

“… for densely packed die with high quality creates a need for improved modeling and operational strategies…”
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Multivariable run-to-run control of thermal atomic layer etching of aluminum oxide thin films by Yun, Sungil, Tom, Matthew, Ou, Feiyang, Orkoulas, Gerassimos, Christofides, Panagiotis D.

“…With the growing scarcity of semiconducting devices stemming from volatile prices, shortened supplies, and increased demand that are attributed to the Covid-19…”
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Multiscale Modeling of CO2 Electrochemical Reduction on Copper Electrocatalysts: A Review of Advancements, Challenges, and Future Directions by Gholizadeh, Reza, Pavlin, Matic, Huš, Matej, Likozar, Blaž

“…) and (Molecular Dynamics, MD), with mesoscale (kinetic Monte Carlo, KMC, and microkinetics, MK) and macroscale (computational fluid dynamics, CFD…”
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Machine learning-based modeling and operation for ALD of SiO2 thin-films using data from a multiscale CFD simulation by Ding, Yangyao, Zhang, Yichi, Ren, Yi Ming, Orkoulas, Gerassimos, Christofides, Panagiotis D.

“…[Display omitted] •Multiscale computational fluid dynamics (CFD) modeling of ALD reactor…”
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Staggered grids for multidimensional multiscale modelling by Divahar, J., Roberts, A.J., Mattner, Trent W., Bunder, J.E., Kevrekidis, Ioannis G.

“…For high accuracy and to improve simulated wave characteristics, this article extends the concept of staggered grids to novel multidimensional multiscale modelling enabling efficient computation on sparse patches…”
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