Silicon nitride in electronics /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Amsterdam :
Elsevier,
1988
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| Series: | Materials science monographs
Vol. 34 |
| Subjects: | |
| ISBN: | 0444426892 |
| Online Access: |
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| Physical Description: | VIII, 263 s. : grafy, lit., obr. ; |
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| ISBN: | 0444426892 |