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Advanced process modeling for VLSI technology /

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Bibliographic Details
Main Author:	Puchner, Helmut
Format:	Book
Language:	English
Published:	Wien : Österreichischer Kunst- und Kulturverlag, 1996
Edition:	[1st ed.]
Series:	Dissertationen der Technischen Universität Wien Band 74
Subjects:	polovodič > simulácia > polysilikón
ISBN:	3854371306
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