Atomic layer epitaxy growth of titanium, zirconium and hafnium dioxide thin films /

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Bibliographic Details
Main Author: Ritala, Mikko
Other Authors: Koskikallio, J. (Editor)
Format: Thesis Book
Language:English
Published: Helsinki : Suomalainen Tiedeakatemia, 1994
Edition:[1st ed.]
Series:II. Chemica : Series A Vol. 257
Subjects:
kysličníkový supravodič > termodynamika > mechanika
ISBN:9514107551
ISSN:0066-1961
Online Access: Get full text
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Description
Physical Description:48 s. : grafy, lit., obr., tab. ;
ISBN:9514107551
ISSN:0066-1961

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