Process engineering analysis in semiconductor device fabrication /
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| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
New York :
McGraw-Hill,
1993
|
| Edition: | [1st ed.] |
| Series: | Chemical engineering series
|
| Subjects: | |
| ISBN: | 0070418535 |
| Online Access: |
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| 242 | 1 | 0 | |a Analýza technologických procesov vo výrobe polovodičových prístrojov |
| 245 | 1 | 0 | |a Process engineering analysis in semiconductor device fabrication / |c Stanley Middleman, Arthur K. Hochberg |
| 250 | |a [1st ed.] | ||
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