APA (7th ed.) Citation

Middleman, S., & Hochberg, A. K. (1993). Process engineering analysis in semiconductor device fabrication ([1st ed.].). McGraw-Hill.

Chicago Style (17th ed.) Citation

Middleman, Stanley, and Arthur K. Hochberg. Process Engineering Analysis in Semiconductor Device Fabrication. [1st ed.]. New York: McGraw-Hill, 1993.

MLA (9th ed.) Citation

Middleman, Stanley, and Arthur K. Hochberg. Process Engineering Analysis in Semiconductor Device Fabrication. [1st ed.]. McGraw-Hill, 1993.