Thompson, L. F., & Willson, C. G. (1983). INTRODUCTION TO MICROLITHOGRAPHY: Theory, materials and processing. American Chemical Society.
Citace podle Chicago (17th ed.)Thompson, Larry F., a C. G. Willson. INTRODUCTION TO MICROLITHOGRAPHY: Theory, Materials and Processing. Washington: American Chemical Society, 1983.
Citace podle MLA (9th ed.)Thompson, Larry F., a C. G. Willson. INTRODUCTION TO MICROLITHOGRAPHY: Theory, Materials and Processing. American Chemical Society, 1983.
Upozornění: Tyto citace jsou generovány automaticky. Nemusí být zcela správně podle citačních pravidel..