TECHNOLOGIJA MIKROSCHEM /

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Bibliographic Details
Main Author: Parfenov, Oleg Dmitrijevič
Other Authors: Nikitina, S. V. (Editor)
Format: Book
Language:Russian
Published: Moskva : Vysšaja škola, 1986
Online Access: Get full text
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Description
Physical Description:318 S. : grafy, lit., obr., tab. ;