Ion bombardment and ion-assisted etching in rf discharges /
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| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
Delft :
Technická univerzita,
1991
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| Edition: | 1st ed. |
| Subjects: | |
| Online Access: |
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| 100 | 1 | |a Manenschijn, Albert | |
| 242 | 1 | 0 | |a Iónové ožarovanie a leptanie iónmi v rf výbojoch |
| 245 | 1 | 0 | |a Ion bombardment and ion-assisted etching in rf discharges / |c Albert Manenschijn |
| 250 | |a 1st ed. | ||
| 260 | |a Delft : |b Technická univerzita, |c 1991 | ||
| 300 | |a 147 s. : |b grafy, lit., obr., tab. ; | ||
| 502 | |d 3. 10. 1991 | ||
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