APA (7th ed.) Citation

Stemme, G. (1987). Three new sensors and a special structure based on micromachining of silicon. Chalmers Tekniska Högskola.

Chicago Style (17th ed.) Citation

Stemme, Göran. Three New Sensors and a Special Structure Based on Micromachining of Silicon. Göteborg: Chalmers Tekniska Högskola, 1987.

MLA (9th ed.) Citation

Stemme, Göran. Three New Sensors and a Special Structure Based on Micromachining of Silicon. Chalmers Tekniska Högskola, 1987.

Warning: These citations may not always be 100% accurate.