On the throughput optimization of electron beam lithography systems /
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| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
Delft :
Technická univerzita,
1991
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| Edition: | 1st ed. |
| Subjects: | |
| Online Access: |
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| 100 | 1 | |a Mulder, Elvira Hendrika | |
| 242 | 1 | 0 | |a Optimalizácia litografických systémov s elektrónovým lúčom z hľadiska výkonu |
| 245 | 1 | 0 | |a On the throughput optimization of electron beam lithography systems / |c Elvira Hendrika Mulder |
| 250 | |a 1st ed. | ||
| 260 | |a Delft : |b Technická univerzita, |c 1991 | ||
| 300 | |a Preruš. str. : |b fotogr., grafy, lit., obr., tab. ; | ||
| 502 | |d 13. 6. 1991 | ||
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