Vacuum deposition by pulsed laser radiation : Plasma composition, deposition techniques and thin film properties /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
Delft :
Technická univerzita,
1989
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| Physical Description: | 110 s. : fotogr., grafy, lit., obr., tab. ; |
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