Advanced Packaging and Manufacturing Technology Based on Adhesion Engineering Wafer-Level Transfer Packaging and Fabrication Techniques Using Interface Energy Control Method /
This book introduces microelectromechanical systems (MEMS) packaging utilizing polymers or thin films - a new and unique packaging technology. It first investigates the relationship between applied load and opening displacement as a function of benzocyclobutene (BCB) cap size to find the debonding b...
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| Main Author: | |
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Cham :
Springer International Publishing,
2018.
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| Edition: | 1st ed. 2018. |
| Series: | Springer Series in Advanced Manufacturing,
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| Subjects: | |
| ISBN: | 9783319778723 |
| ISSN: | 1860-5168 |
| Online Access: |
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