APA (7th ed.) Citation

(1991). Handbook of VLSI Microlithography: Principles, Technology and Applications. Elsevier.

Chicago Style (17th ed.) Citation

Handbook of VLSI Microlithography: Principles, Technology and Applications. : Elsevier, 1991.

MLA (9th ed.) Citation

Handbook of VLSI Microlithography: Principles, Technology and Applications. Elsevier, 1991.

Warning: These citations may not always be 100% accurate.