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|a Handbook of VLSI Microlithography
|b Principles, Technology, and Applications
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|h [elektronický zdroj]
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| 250 |
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|a 2nd ed.
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| 260 |
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|a :
|b Elsevier,
|c 2001
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|a 978-0-8155-1444-2
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|f Elektronické zdroje
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