APA (7th ed.) Citation

(2001). Handbook of VLSI Microlithography: Principles, Technology, and Applications (2nd ed.). Elsevier.

Chicago Style (17th ed.) Citation

Handbook of VLSI Microlithography: Principles, Technology, and Applications. 2nd ed. : Elsevier, 2001.

MLA (9th ed.) Citation

Handbook of VLSI Microlithography: Principles, Technology, and Applications. 2nd ed. Elsevier, 2001.

Warning: These citations may not always be 100% accurate.