HIGH VACUUM PRODUCTION IN THE MICROELECTRONICS INDUSTRY /
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| Main Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Amsterdam :
Elsevier,
1988
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| Series: | Plasma technology
Vol. 2 |
| Online Access: |
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| Physical Description: | 13, 222 S. : fotogr., grafy, obr., tab. ; |
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