Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors

This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the ther...

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Bibliographic Details

Main Author:	Dinh, Toan (Author)
Format:	Electronic eBook
Language:	English
Published:	Singapore : Springer Singapore , 2018.
Edition:	1st ed. 2018.
Series:	SpringerBriefs in Applied Sciences and Technology,
Subjects:	Nanotechnology. Solid state physics.
ISBN:	9789811325717
ISSN:	2191-530X
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