Silicon Anodization as a Structuring Technique Literature Review, Modeling and Experiments /
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimen...
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| Main Author: | |
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Wiesbaden :
Springer Fachmedien Wiesbaden : Vieweg,
2018.
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| Edition: | 1st ed. 2018. |
| Subjects: | |
| ISBN: | 9783658192389 |
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Table of Contents:
- Silicon Anodization: State of the Art
- Experimental, Characterization and Simulation Methods
- Microscale Study of Anodization Process
- Anodization Process as a Structuring Technique: Experiments and Simulation.