Silicon Anodization as a Structuring Technique Literature Review, Modeling and Experiments /

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimen...

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Bibliographische Detailangaben

1. Verfasser:	Ivanov, Alexey (VerfasserIn)
Format:	Elektronisch E-Book
Sprache:	Englisch
Veröffentlicht:	Wiesbaden : Springer Fachmedien Wiesbaden : Vieweg, 2018.
Ausgabe:	1st ed. 2018.
Schlagworte:	Nanotechnology. Applied mathematics. Engineering mathematics. Thermodynamics. Heat engineering. Heat transfer. Mass transfer.
ISBN:	9783658192389
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