Micro Electro Mechanical Systems

This handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, po...

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Bibliographic Details

Format:	Electronic eBook
Language:	English
Published:	Singapore : Springer Singapore , 2018.
Edition:	1st ed. 2018.
Series:	Micro/Nano Technologies,
Subjects:	Mechatronics. Nanotechnology. Electronics. Microelectronics. Microwaves. Optical engineering.
ISBN:	9789811059452
ISSN:	2522-5065
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