Sputtering by particle bombardment. Vol. 2, Sputtering of alloys and compoands, electron and neutron sputtering, surface topography /
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| Format: | Buch |
| Sprache: | Tschechisch |
| Veröffentlicht: |
Berlin :
Springer,
1983
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| Schriftenreihe: | rz1
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| 100 | |a Behrisch, Rainer |4 aut | ||
| 245 | 1 | 0 | |a Sputtering by particle bombardment. |n Vol. 2, |p Sputtering of alloys and compoands, electron and neutron sputtering, surface topography / |c Autori: Rainer Behrisch ... [et al.] |
| 260 | 3 | |a Berlin : |b Springer, |c 1983 | |
| 300 | |a 12, 391 s. | ||
| 830 | |a rz1 | ||
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| 999 | |c 217758 |d 217758 | ||