TRUDY INSTITUTA OBŠČEJ FIZIKI. TOM 8. PROBLEMY LITOGRAFII V MIKROELEKTRONIKE /

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Bibliographic Details
Main Author: Valijev, K. A.
Other Authors: Machuiladze, T. M. (Editor)
Format: Book
Language:Russian
Published: Moskva : Nauka, 1987
Online Access: Get full text
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