Journal of vacuum science and technology: B, Microelectronics processing and phenomena

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Bibliographic Details
Format: Serial
Language:English
Published: New York : American Institute of Physics
Subjects:
vákuová technika > vákuum > vákuová fyzika > zrieďovanie vzduchu > zrieďovanie plynov > vývevy
ISSN:0734-211X
Online Access: Get full text
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