MEMS : introduction and fundamentals /
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| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | Englisch |
| Veröffentlicht: |
Boca Raton :
Taylor & Francis,
2006
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| Ausgabe: | 2nd ed. |
| Schriftenreihe: | Mechanical engineering series
|
| Schlagworte: | |
| ISBN: | 0849391377 |
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