MEMS : applications /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boca Raton :
Taylor & Francis,
2006
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| Edition: | 2nd ed. |
| Series: | Mechanical engineering series
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| Subjects: | |
| ISBN: | 0849391393 |
| Online Access: |
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| Item Description: | The MEMS handbook |
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| Physical Description: | [520 s.] : fotogr., grafy, lit., obr., tab. ; |
| ISBN: | 0849391393 |