Gelpey, J. (2002). 10th IEEE international conference on advanced thermal processing of semiconductor - RTP 2002: Vancouver, Canada, Sept. 25 - 27, 2002 ([1st ed.].). Institute of Electrical and Electronics Engineers.
Chicago-Zitierstil (17. Ausg.)Gelpey, Jeff. 10th IEEE International Conference on Advanced Thermal Processing of Semiconductor - RTP 2002: Vancouver, Canada, Sept. 25 - 27, 2002. [1st ed.]. Piscataway: Institute of Electrical and Electronics Engineers, 2002.
MLA-Zitierstil (9. Ausg.)Gelpey, Jeff. 10th IEEE International Conference on Advanced Thermal Processing of Semiconductor - RTP 2002: Vancouver, Canada, Sept. 25 - 27, 2002. [1st ed.]. Institute of Electrical and Electronics Engineers, 2002.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.