Sumney, L. W. (1979). Developments in semiconductor microlithography. Vol. 4: Proceedings, California, April 23 - 24, 1979. Soc. of Photo-optical Instrumentation Engineers.
Chicago-Zitierstil (17. Ausg.)Sumney, Larry W. Developments in Semiconductor Microlithography. Vol. 4: Proceedings, California, April 23 - 24, 1979. San Jose: Soc. of Photo-optical Instrumentation Engineers, 1979.
MLA-Zitierstil (9. Ausg.)Sumney, Larry W. Developments in Semiconductor Microlithography. Vol. 4: Proceedings, California, April 23 - 24, 1979. Soc. of Photo-optical Instrumentation Engineers, 1979.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.