Ion implantation. Equipment and techniques : Proceedings of the 4th internat. conf., Berchtesgaden, Fed. Rep. of Germany, Sept. 13 - 17, 1982 /
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| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Berlin :
Springer,
1983
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| Series: | Series in electrophysics
Vol. 11 |
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