Ion implantation. Equipment and techniques : Proceedings of the 4th internat. conf., Berchtesgaden, Fed. Rep. of Germany, Sept. 13 - 17, 1982 /
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| Körperschaft: | |
| Format: | Tagungsbericht Buch |
| Sprache: | Englisch |
| Veröffentlicht: |
Berlin :
Springer,
1983
|
| Schriftenreihe: | Series in electrophysics
Vol. 11 |
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| 100 | 1 | |a Hanley, P. R. | |
| 111 | 0 | |a Proceedings of the 4th internat. conf. |d (Sept. 13 - 17, 1982 : |c Fed. Rep. of Germany, Berchtesgaden) | |
| 242 | 1 | 0 | |a Iónová implantácia. Prístroje a techniky |
| 245 | 1 | 0 | |a Ion implantation. Equipment and techniques : |b Proceedings of the 4th internat. conf., Berchtesgaden, Fed. Rep. of Germany, Sept. 13 - 17, 1982 / |c Authors: P. R. Hanley and Co. |
| 260 | |a Berlin : |b Springer, |c 1983 | ||
| 300 | |a 10, 556 s. | ||
| 490 | 0 | |a Series in electrophysics |v Vol. 11 | |
| 760 | 1 | |t Series in electrophysics |g Vol. 11 | |
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