Citace podle APA (7th ed.)

Marcoux, P. (1999). IEEE international symposium on semiconductor manufacturing. Conference proceedings. 1999: 8th internat. symp., Santa Clara, California, Oct. 11 - 13, 1999 ([1st ed.].). Institute of Electrical and Electronics Engineers.

Citace podle Chicago (17th ed.)

Marcoux, Pierre. IEEE International Symposium on Semiconductor Manufacturing. Conference Proceedings. 1999: 8th Internat. Symp., Santa Clara, California, Oct. 11 - 13, 1999. [1st ed.]. Piscataway: Institute of Electrical and Electronics Engineers, 1999.

Citace podle MLA (9th ed.)

Marcoux, Pierre. IEEE International Symposium on Semiconductor Manufacturing. Conference Proceedings. 1999: 8th Internat. Symp., Santa Clara, California, Oct. 11 - 13, 1999. [1st ed.]. Institute of Electrical and Electronics Engineers, 1999.

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